| Mask Fabrication |
| - Mask Dimensions |
| - Fabrication Process |
| - How to Order |
| Silicon Microfabrication |
| - Capabilities |
| - Facilities |
| One-Stop Services |
Mask Dimensions
| Quartz mask | Soda lime mask | Mylar mask |
| 5x/4x Reticles | 1x Photomasks and Copies | 1x Photomasks |
| 6 x 6 x 0.120 / 0.250 inch | 3 x 3 x 0.060 inch | 3 x 3 inch |
| 4 x 4 x 0.060 / 0.090 inch | 5 x 5 inch | |
| 1x Photomasks and Copies | 5 x 5 x 0.090 inch | 7 x 7 inch |
| 3 x 3 x 0.060 inch | 6 x 6 x 0.120 inch | 9 x 9 inch |
| 4 x 4 x 0.060 / 0.090 inch | 7 x 7 x 0.120 inch | |
| 5 x 5 x 0.090 inch | Exposure: laser | |
| 6 x 6 x 0.120 inch | Exposure: laser, e-beam | CD: 25 micron |
| 7 x 7 x 0.120 inch | CD: 1.5 micron | |
| Resolution: | ||
| Exposure: e-beam | 8000dpi/16000dpi | |
| CD: 0.75 micron | ||
Other formats and non-standard substrates (incl. direct writing on wafers ) are possible on request. | ||
MATERIALS
- Semiconductor Si wafers and Solar wafers
- Silicon on insulator (SOI) wafers
- Mask blanks (soda lime and quartz)
- Glass wafers (Pyrex 7740, quartz, soda lime, etc)
- AIIIBV compounds (GaAs, GaP, InP, InAs, etc)
- Sapphire wafers
- Sputtering targets
- Thin films-Oxide, nitride
- Packing boxes for crystal, wafers, filter, chip, etc
- Optical component
SERVICES
- Fabrication of soda lime/quartz photolithographic masks
- Silicon microfabrication (wet etching, dry etching and wafer bonding)
- Consultancy of fabrication process
- Characterization of microdevices/microsystems
- Consultancy of microfluidics and biological microdevices
Service Hotline:
Tel.: +65-6515 8750
Fax : +65-6515 8795
Email: sales@bondatek.com